Modeling the Electrostatic Actuation of Nanomechanical Pillar Dimers
نویسندگان
چکیده
With their unparalleled mass sensitivity, enabling single-molecule spectrometry, nanomechanical resonators have the potential to considerably improve existing sensor technology. Vertical pillar are a promising alternative lateral resonator designs. However, one major obstacle still stands in way of practical use: The efficient transduction (actuation & detection) vibrational motion such tiny structures, even more so when large arrays nanopillars need be driven. While electrostatic forces typically weak and, on nanoscale weaker compared cantilever-like stiffness, it is worth revisiting possibility actuation pillars and other structures. In this paper, these produced by an external field studied both analytically numerically, dependencies geometric dimensions discussed. Furthermore, expected deflections for different configurations geometries calculated compared.
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ژورنال
عنوان ژورنال: Frontiers in Mechanical Engineering
سال: 2021
ISSN: ['2297-3079']
DOI: https://doi.org/10.3389/fmech.2020.611590